Application of ion beam analysis to materials science.
نویسندگان
چکیده
منابع مشابه
Computer Simulation of Ion Beam Analysis of Laterally Inhomogeneous Materials
The program STRUCTNRA for the simulation of ion beam analysis charged particle spectra from arbitrary two-dimensional distributions of materials is described. The code is validated by comparison to experimental backscattering data from a silicon grating on tantalum at di erent orientations and incident angles. Simulated spectra for several types of rough thin layers and a chessboard-like arrang...
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ژورنال
عنوان ژورنال: Bulletin of the Japan Institute of Metals
سال: 1988
ISSN: 0021-4426,1884-5835
DOI: 10.2320/materia1962.27.241